Low temperature co-fired ceramic packaging of CMOS capacitive sensor chip towards cell viability monitoring

• Niina Halonen,
• Joni Kilpijärvi,
• Maciej Sobocinski,
• Timir Datta-Chaudhuri,
• Antti Hassinen,
• Someshekar B. Prakash,
• Peter Möller,
• Pamela Abshire,
• Sakari Kellokumpu and
• Anita Lloyd Spetz

Beilstein J. Nanotechnol. 2016, 7, 1871–1877, doi:10.3762/bjnano.7.179

• effects on cells caused by nanomaterials, preferably by label-free, noninvasive, fast, and cost effective methods. These requirements can be met by monitoring cell viability with a capacitance-sensing integrated circuit (IC) microchip. The capacitance provides a measurement of the surface attachment of

• medium above the capacitors. Moreover, the manufacturing of microfluidic channels in the LTCC package was demonstrated. Keywords: capacitance sensing; cell viability; lab-on-a-chip; low temperature co-fired ceramic (LTCC); Introduction Biosafety regulations require ethical, simple, rapid, and cost

• capacitance sensing and the intention is to develop a method for nanoparticle exposure of cells to establish cytotoxicity assessment of nanomaterials. Capacitance measurements reflect the surface attachment of adherent cells. While healthy cells attach to the cultivation surface and spread out, dying cells